100 kPa on-chip temperature compensated silicon pressure sensors

100 kPa On-Chip Temperature Compensated Silicon Pressure Sensors

0 to 6 kPa (0 to 0.87 psi) 0.2 to 4.8 V output integrated pressure sensor

0 to 200 kPa (0 to 29 psi) 40 mV full scale (typical)